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Sputtering Targets

Sputtering targets are materials used in the sputtering process, a technique commonly used to deposit thin films of materials onto a substrate. Depending on the specific application and requirements, sputtering targets can be made from various materials, including metals, alloys, ceramics, and composites. Sputtering targets can be produced in various shapes and sizes, depending on the specific application and requirements.

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Description
Aluminum (Al) Metal
Aluminum (Al) Metal
Pure aluminum is a lightweight silvery-white metal. It is soft and malleable with a low density. It is non-toxic and with high tensile strength. It has high thermal conductivity and excellent corrosion resistance and can be easily cast, machined, and formed. It is non-magnetic and non-sparking. Weight for weight is twice as good as a conductor of electricity as copper. Purities are available from as high of a typical purity of 99.996% down for some granulations to low-purity recycled scrap aluminum alloys.
Aluminum Nitride (AlN)
Aluminum Nitride (AlN)
Aluminum Nitride (AlN) is a hard white crystalline solid with high thermal stability (Melting point of 2200ºC), high resistance, and low porosity. It is a ceramic with high–thermal conductivity and a low thermal expansion coefficient. It is used as an electronic substrate due to its high electrical resistance, low dielectric constant, and wide bandgap. Aluminum nitride component typical value = >96%
Antimony(III) Oxide (Sb₂O₃) / Antimony(V) Oxide (Sb₂O₅)
Antimony(III) Oxide (Sb₂O₃) / Antimony(V) Oxide (Sb₂O₅)
Antimony(III) Oxide (Sb₂O₃) (Antimony trioxide) is a white solid and is the most important commercial compound of antimony. Antimony(V) Oxide (Sb₂O₅) (Antimony pentoxide) is a yellow powdery solid that is very slightly soluble in water.
Antimony(III) Sulfide (Sb₂S₃)
Antimony(III) Sulfide (Sb₂S₃)

Antimony(III) Sulfide (Sb₂S₃), or Antimony Trisulfide, is the most common antimony mineral and the chief source of the metal. It is a black needle-like crystal and semiconductor with a direct band gap of 1.8–2.5 eV. Purity: 98.0% up to 99.99% Powder sized down to nanometers

Barium Ferrite
Barium Ferrite

Barium Ferrite (BaFe, BaFe₁₂2O₁₉) is a metal oxide that is a highly magnetic material and has a high packing density. The material is resistant to temperature change, corrosion, and oxidation, making it useful for long-term storage. Purity: 99.5%

Barium Titanate (BaTiO₂)
Barium Titanate (BaTiO₂)
Barium Titanate (BaTiO₂), barium titanium oxide, is a white crystalline solid with a melting point of 1,625ºC. It is widely used in electronic ceramics because it exhibits ferroelectric and piezoelectric properties with a photorefractive effect. It is insoluble in water but soluble in dilute acids and concentrated acids. It is a dielectric ceramic that can become semiconductors when doped with small amounts of transition metals like scandium, yttrium, neodymium, and samarium. Purity: 99.8% to 99.9%
Beryllium (Be) Metal
Beryllium (Be) Metal

Beryllium is a silvery-white metal that is relatively soft and has a low density. Although it is the lightest structural metal, it has high tensile strength and stiffness. It has one of the highest melting points of light metals. At ordinary temperatures, beryllium resists oxidation in air and is resistant to concentrated nitric acid. Beryllium is nonmagnetic, offers excellent electrical and thermal conductivity, has a high heat capacity, and can take a high polish. Purity 98.0% up to 99.9999% pure, along with Be alloys

Bismuth Ferrite (BiFeO₃)
Bismuth Ferrite (BiFeO₃)
Bismuth ferrite (BiFeO₃), referred to as BFO, is an inorganic, synthesized, lead-free piezoelectric material that has multiferroic properties at room temperature and exhibits a ferroelectric photovoltaic (FPV) effect.
Bismuth(III) Telluride (Bi₂Te₃)
Bismuth(III) Telluride (Bi₂Te₃)
Bismuth(III) Telluride (Bi₂Te₃) is a gray or black crystalline solid or gray powder that possesses excellent semiconductor activity. It is widely regarded as one of the best materials for room-temperature thermoelectric devices. Undoped Purity: 99.999%
Cerium (Ce) Metal
Cerium (Ce) Metal

Cerium (Ce) is a rare earth metal that is an iron-gray, soft, ductile, and malleable metal. It is the most abundant of the rare earth elements. It is a reactive metal that rapidly oxidizes in air to form a superficial oxide coating. The metal reacts slowly with cold water and rapidly with hot water. It is readily dissolved in mineral acids and will react with most nonmetals on heating. Purity: 99.9-99.95%

Chromium (Cr)
Chromium (Cr)
Chromium (Cr) is a steel-gray, lustrous, and hard metal, with high corrosion and tarnish resistance since chromium does not oxidize in air, even in extreme moisture. Purity range: 99%-99.998%
Cobalt (Co) Metal
Cobalt (Co) Metal
Cobalt (Co) Metal is a lustrous, silvery-blue metal that is magnetic and attractive. Cobalt is hard and resistant to corrosion Purity from 99.5% - 99.9%
Cobalt Oxides
Cobalt Oxides
Cobalt(II) Oxide (CoO) (also known as cobaltous oxide and cobalt monoxide) appears as olive-green to red crystals or grayish or black powder that is insoluble in water but soluble in acids and alkalis. It is a toxic solid. Cobalt(II,III) Oxide (Co₃O₄) (also known as tricobalt tetraoxide) is a fine powder that is an antiferromagnetic solid. It is insoluble in water but soluble in acids and alkalis. Cobalt Oxide Carcinogenicity: Cobalt and its compounds have been shown to cause cancer in laboratory animals.
Cobalt(IV) Sulfide (CoS₂)
Cobalt(IV) Sulfide (CoS₂)
Cobalt sulfides are black, semiconducting, insoluble in water, and nonstoichiometric. Cobalt(IV) Sulfide (CoS₂) or Cobalt disulfide (CoS₂) Purity: 99.5%
Copper (Cu) Metal
Copper (Cu) Metal

Copper (Cu) is one of the most important elements. It is a reddish metal that is malleable and ductile with a bright metallic luster. Copper is a good conductor of heat and electricity (second only to silver in electrical conductivity). Purity from 98% to 99.999%

Erbium Oxide (Er₂O₃)
Erbium Oxide (Er₂O₃)
Erbium(III) Oxide (Er₂O₃), or Erbium Oxide, is a light pink paramagnetic solid. It is insoluble in water but soluble in mineral acids. Er₂O₃ is hygroscopic and will readily absorb moisture and CO2 from the atmosphere. Purity: 99.9-99.999%
Europium (Eu) Metal
Europium (Eu) Metal
Europium (Eu) is a rare earth metal that is silvery-white. It is the least dense, softest, and most ductile of the lanthanide series. Europium is the most volatile of the rare earth metals and quickly oxidizes in air and reacts in water. Purity- 99-99.9%
Gadolinium (Gd) Metal
Gadolinium (Gd) Metal
Gadolinium (Gd) is a rare earth metal that is moderately ductile, hard, and fairly stable in the air. Gadolinium reacts slowly with water and rapidly with most diluted acids. Gadolinium has unusual superconductive properties when alloyed with iron, chromium, or related metals and is found to greatly improve workability and resistance to temperature and oxidation. Gadolinium also has unique magnetic properties and demonstrates ferromagnetic properties near room temp but paramagnetic properties above this temp. Purity: 99.9%
Gadolinium Oxide (Gd₂O₃)
Gadolinium Oxide (Gd₂O₃)
Gadolinium Oxide (Gd₂O₃) is a white powder that is highly insoluble and thermally stable. The purity available is 99.9%.
Gallium Nitride (GaN)
Gallium Nitride (GaN)
Gallium Nitride (GaN) is a very hard, mechanically stable wide-bandgap semiconductor material with high heat capacity and thermal conductivity. Gallium nitride emits visible light (particularly blue and green). Purity: 99.9%
Germanium (Ge)
Germanium (Ge)
Germanium (Ge) is a silvery-white, bright, brittle semi-metal. It is a poor conductor of electricity, has a high index of refraction and dispersion, and is transparent to infrared radiation. Purity Up to 99.999%
Green Nickel Oxide - Nickel(II) Oxide (NiO)
Green Nickel Oxide - Nickel(II) Oxide (NiO)
Green Nickel Oxide, Nickel(II) Oxide (NiO) is an inorganic metal oxide with a good semiconducting property used in the production of nickel alloys, salts, catalysts, fuel cells, and other chemicals. It exhibits high performance in applications that require charge transfer and charge transport-based processes.
Hafnium Diboride (HfB₂)
Hafnium Diboride (HfB₂)
Hafnium diboride is a gray, metallic-looking, ultrahigh-temperature ceramic composed of Hafnium and Boron. It has relatively high thermal and electrical conductivity and a melting temperature of about 3250ºC. The material's oxidation resistance is temperature, and pressure dependent, where at 1500ºC and 1 atm of pressure, it shows resistance; however, at temperatures above 1600ºC and pressures drop below 1 atm, the oxidation resistance is dramatically reduced. Purities available 99% to 99.99%
Hafnium (Hf) Metal
Hafnium (Hf) Metal
Hafnium (Hf) Metal is a ductile silvery metal that is corrosion resistant. Hafnium has a very high melting point. Hafnium is chemically resemblant to zirconium, found in zirconium minerals, and hafnium’s properties are highly affected by the extent of zirconium impurity. Hafnium is a good absorber of neutrons. 99.7% minimum. Higher purities are available.
Hafnium Nitride (HfN)
Hafnium Nitride (HfN)
Hafnium Nitride (HfN) is formed as yellow-brown and brittle solid with a melting point of 3310ºC It is an advanced ceramic powder and is among the most stable. It has excellent mechanical, electrical, optical, thermal, and corrosion resistance characteristics. It creates an abrasion-resistant, chemically inert outer film for cutting tools, a high temperature-resistant protective film with high hardness, wear resistance, and oxidation resistance. Purity: 99%-99.5%
Indium(III) Arsenide (InAs)
Indium(III) Arsenide (InAs)
Indium(III) arsenide, InAs, or indium monoarsenide, is a semiconductor material that has the appearance of grey cubic crystals. It has a melting point of 942°C. It is a strong photo-dember emitter with superior electron mobility and velocity and a narrow energy bandgap. Purity: 99.999% (5N)
Lanthanum (La) Metal
Lanthanum (La) Metal
Lanthanum (La) is one of the most reactive rare earth metals. It is silvery-white, soft, ductile, and malleable. It oxidizes rapidly when exposed to air and reacts with water temperature dependently. It burns easily when ignited.
Lithium (Li) Metal
Lithium (Li) Metal
Lithium (Li) is a soft, silvery alkali metal. While it is the least reactive of the alkali metals, it reacts vigorously with water. Lithium has the lowest density of all metals; however, it has the highest specific heat of any solid element, making it useful in heat transfer applications.
Lutetium(III) Oxide (Lu₂O₃)
Lutetium(III) Oxide (Lu₂O₃)
Lutetium(III) oxide, a white solid, also called lutecia, is a lanthanide oxide that is insoluble in water but soluble in all common acids. Lutecia exhibits favorable physical properties, such as a high melting point (around 2400ºC), phase stability, mechanical strength, hardness, thermal conductivity, and low thermal expansion; lutetium(III) oxide is not conductive to electricity. This material is offered in R&D quantities. Purity: 99.9%
Magnesium DiBoride (MgB₂)
Magnesium DiBoride (MgB₂)
Magnesium Diboride (MgB₂), is a dark gray, water-insoluble solid that becomes superconducting at 39 K (−234 °C). Typical purity= 99% (Ca= <600 ppm)
Manganese (Mn) Metal
Manganese (Mn) Metal
Manganese (Mn) Metal is a lustrous, steel-gray metal that resembles iron but is harder and very brittle, making its applications as a pure metal minimal, and mainly used in alloys, such as steel. In steel, manganese greatly improves strength, wear resistance, hardness, and many other qualities, and forms highly ferromagnetic alloys when combined with aluminum and antimony or copper. Typical "as received" Physical Properties of -325 Mesh* Electrolytic Manganese Powder Apparent Density g/cm3: 2.4 - 3.4 Purity: 99.6% up to 99.99%
Molybdenum(IV) Oxide (MoO₂)
Molybdenum(IV) Oxide (MoO₂)
Molybdenum(IV) Oxide (MoO₂), sometimes referred to as Molybdenum Dioxide, is a violet-colored solid that has good electrical conductivity due to the presence of delocalized electrons in its valence band. It is air sensitive and incompatible with strong oxidizing agents and strong bases. Purities available between 99% and 99.999%
Molybdenum(VI) Oxide (MoO₃)
Molybdenum(VI) Oxide (MoO₃)
Molybdenum (VI) Oxide (MoO₃), sometimes referred to as Molybdenum Trioxide, is a yellow solid that is thermally stable and not very soluble in water but is in concentrated acids and bases. It is the most widely produced Molybdenum compound. It is a wide bandgap-type semiconductor with distinctive electrochromic, thermochromic, and photochromic properties. Purities available between 99% and 99.999%
Neodymium (Nd) Metal
Neodymium (Nd) Metal

Neodymium (Nd) is a rare earth metal that is a soft, malleable, silvery-white metal and tarnishes in the air. It is one of the more reactive rare earth metals. It has a high electrical resistivity and is paramagnetic.

Purity 99-99.999%

Neodymium(III) Oxide (Nd₂O₃)
Neodymium(III) Oxide (Nd₂O₃)
Neodymium(III) Oxide (Nd₂O₃) is a grayish-blue crystal with a hexagonal structure. It is highly insoluble in water but soluble. It is thermally stable and not conductive to electricity. Purities available are between 99% and 99.99%
Nickel Aluminides
Nickel Aluminides
Nickel Aluminides, Al₃Ni, and Ni₃Al are intermetallic compounds that are useful because they are very strong and hard and melt only at very high temperatures. They also are widely used due to their corrosion resistance, low density, and easy production. A disadvantage is their brittleness at room temperature, which extends to high temperatures for Ni₃Al. Nickel Aluminide, Al₃Ni, is a cermet, that can be flame sprayed, and whose strengthening γ' phase precipitates in nickel-based superalloys, allowing for high-temperature strength up to 0.7-0.8 of its melting temperature.
Niobium (Nb) Metal
Niobium (Nb) Metal

Niobium (Nb), also referred to as Columbium, is a silvery metal that is very resistant to corrosion due to a layer of oxide on its surface. It has superconductive properties and is comparatively soft and ductile when very pure. Niobium improves strength when used in alloying. 99.8% up to 99.99%

Niobium Oxides (Nb₂O₅, NbO₂, NbO)
Niobium Oxides (Nb₂O₅, NbO₂, NbO)
Niobium oxides (NbO, NbO₂, Nb₂O₅) are versatile materials with outstanding electrical, mechanical, chemical, and magnetic properties. Niobium (V) Oxide, Nb2O5 (Niobium pentoxide), is colorless and insoluble. A fairly unreactive solid that is the most widespread precursor for other compounds and materials containing niobium. Niobium (II) Oxide, NbO (Niobium monoxide), is a gray solid with metallic conductivity. Niobium (IV) Oxide, NbO₂ (Niobium dioxide), is a bluish-black non-stoichiometric solid that is insoluble in water and is a powerful reducing agent.
Platinum (Pt) Metal
Platinum (Pt) Metal
Platinum (Pt) is a shiny, silvery-white metal that is corrosion-resistant as much so as gold. It is malleable and ductile when pure.
Praseodymium (Pr) Metal
Praseodymium (Pr) Metal

Praseodymium (Pr) is a rare earth metal that is soft, silvery-yellow, malleable, and ductile. It is more corrosion-resistant in the air than other rare earth metals. Praseodymium is never found free in nature, appearing only in a combined form with other rare earth metals in various minerals. Praseodymium forms brightly colored compounds. Purity 99-99.9%

Rhodium (Rh) Metal
Rhodium (Rh) Metal
Rhodium (Rh) is a silvery-white metal in the platinum group. It has a very reflective surface. It is very hard, durable, and highly resistant to corrosion. It is harder and has a higher melting point than platinum and palladium, making it a useful hardening element in alloying. Rhodium has the highest electrical and thermal conductivity of the group. Purities Available: 99.8% to 99.95%
Ruthenium (Ru) Metal
Ruthenium (Ru) Metal
Ruthenium (Ru) Metal, a member of the platinum group, is a hard, lustrous, white metal that does not tarnish at room temperatures and is inert to most other chemicals. It does not occur natively but in combination with other platinum group metals. Ruthenium combines with platinum and palladium as an effective hardener, creating extremely wear-resistant alloys. It improves the corrosion resistance of titanium and is superconductive when combined with molybdenum Purity 99.9%
Samarium (Sm) Metal
Samarium (Sm) Metal
Samarium (Sm) is a rare earth metal that does not occur freely in nature. It is a lustrous, brittle, silvery-yellow metal that tarnishes in the air and rapidly dissolves in most acids. Samarium has unique magnetic properties. Purity 99-99.9%
Samarium(II) Oxide (Sm₂O₃)
Samarium(II) Oxide (Sm₂O₃)
Samarium(II) oxide (Sm₂O₃) is an important rare earth oxide and is an off-white to pale yellow water-insoluble powder. It has high melting and boiling points (2335 ºC and 4118 ºC), giving it good thermal stability. Samarium (II) oxide has a high dielectric constant, high breakdown electric field, large bandgap, low leakage current, low-frequency dispersion, and low trapping rates. It is also thermodynamically stable on Si substrate and has a high neutron absorption capacity. 99.0% to 99.995% (REO basis)
Scandium(III) Oxide (Sc₂O₃)
Scandium(III) Oxide (Sc₂O₃)
Scandium(III) Oxide (Sc₂O₃), or Scandia, is a white rare earth metal oxide solid with a high melting point. It is heat and thermal shock resistant, making it useful in high-temperature systems. Purity: 99.9% to 99.9999%
Selenium (Se)
Selenium (Se)
Amorphous selenium is either a reddish powder, a gray metallic-looking solid, or a black, vitreous solid. This element resembles sulfur in its various forms and in its compounds. Selenium has many electrical properties, both photovoltaic, where light converts to electricity, and photoconductive, where electrical resistance decreases with increased illumination. It can also convert AC electricity to DC electricity. Purity: 99.5% to 99.99%
Silicon Carbide (SiC)
Silicon Carbide (SiC)

Silicon carbide (SiC) is a hard, covalently bonded light grey solid that is nearly as hard as diamond. It is a refractory material (high melting point) with excellent thermal conductivity and low thermal expansion. It displays good thermal shock resistance, corrosion resistance, and stiffness. Silicon carbide is a semiconductor.

Silicon Nitride (Si₃N₄)
Silicon Nitride (Si₃N₄)
Silicon Nitride (Si₃N₄) is a white to slightly beige powder that has a high melting point and good chemical stability. It is thermodynamically stable, which makes it commercially important. It has a high melting point. It shows high thermal shock resistance, high strength through a wide temperature range, high fracture toughness, high hardness, and outstanding wear resistance to abrasion and corrosion. It has a smaller thermal expansion coefficient and shows small shrinkage by reheating.
Sputtering Targets
Sputtering Targets
Sputtering Targets are necessary raw materials used in physical vapor deposition (PVD) or chemical vapor deposition (CVD). Sputtering is a physical process commonly used for thin film coating, ion etching, and analytical techniques.
Strontium Titanate (SrTiO₃)
Strontium Titanate (SrTiO₃)
Strontium titanate (SrTiO₃), or Strontium Titanium Oxide, is an insoluble powder. Insoluble in water and most solvents. It is the model system for perovskite ceramics because it is stable in the cubic crystal system above-168ºC It is a high dielectric constant material (225-250). Purity: 99.9%
Tantalum Carbide (TaC)
Tantalum Carbide (TaC)
Tantalum carbide (TaC) is an extremely hard (Mohs hardness 9-10), heavy, refractory crystalline ceramic material. It is a gold-colored to brown powder that is extremely resistant to chemical action at normal temperature and is an important cermet material. TaC has the highest known melting point, at 3880°C of any binary compound. Purity: 99.0% to 99.5%
Tantalum Nitride (TaN)
Tantalum Nitride (TaN)
Tantalum Nitride is a hexagonal, brown, bronze, or black crystal that is insoluble in water. Tantalum Nitride is a chemically inert refractory compound that melts at approximately 3360ºC. Powder distributions are available down to as small as 5 to 15 nanometers
Tantalum (Ta) Metal
Tantalum (Ta) Metal
Tantalum (Ta) is a shiny, silvery-gray, heavy, and very hard metal with a color like platinum when polished. It is very resistant to corrosion. It has good thermal conductivity, a high melting point, superior gettering characteristics, and good "valve" action. Purity: 99.9%, 99.95%, 99.98%, and 99.995%
Tantalum(V) Oxide (Ta₂O₅)
Tantalum(V) Oxide (Ta₂O₅)
Tantalum(V) Oxide (Ta₂O₅), Tantalum Pentoxide, is a white solid that is insoluble in all solvents. It is an inert material with a high refractive index and low absorption, which makes it useful for coatings. It has a high dielectric constant and a high bandgap. It also has high biocompatibility and resistivity. Powder Size as small as 0.65 microns Purity: 99.0%-99.997%
Tellurium (Te)
Tellurium (Te)
Tellurium (Te) is a brittle, mildly toxic, rare, silver-white metalloid that is crystalline. It has low electronegativity, is a p-type semiconductor, and shows greater conductivity in certain directions. Typical Purity: 99.5%, 99.99%, 99.9985%, 99.999%, and 99.9999+%
Terbium (Tb) Metal
Terbium (Tb) Metal
Terbium (Tb) is a soft, silvery rare earth metal. It is one of the least abundant rare earth metals. It is malleable, ductile, and soft; it can be cut with a knife. Terbium is relatively stable in air but is more reactive in powder form. Purity 99-99.9%
Thulium (Tm) Metal
Thulium (Tm) Metal
Thulium (Tm)is a rare earth metal and is one of the least abundant rare earth elements. It is silvery-gray, soft, malleable, ductile, and can be cut with a knife. The pure metal is bright and lustrous, and reasonably stable in air. Purity 99%
Titanium(III) Nitride (TiN)
Titanium(III) Nitride (TiN)
Titanium(III) nitride or Titanium nitride is a very hard ceramic material that has high hardness, good corrosion resistance, heat resistance, excellent wear resistance, and is chemically stable. Titanium(III) nitride is brown but appears gold when applied as a coating. The compound becomes superconducting at cryogenic temperatures. Purity: 99.5%
Tungsten(III) Nitride (WN)
Tungsten(III) Nitride (WN)
Tungsten(III) nitride (WN) possesses unique and superior chemical, mechanical, and thermal properties. Tungsten nitride is a hard, solid, brown-colored ceramic material that is electrically conductive and decomposes in water. Purity: 99% min
Ytterbium (Yb) Metal
Ytterbium (Yb) Metal

Ytterbium is used as a dopant to help improve the mechanical properties of stainless steel. It is also used as a doping material in specialty lasers. Other areas where Ytterbium is being used are memory devices and as an industrial catalyst to replace other catalysts considered too toxic and polluting due to its chemical racing ability.

Zirconium (Zr) Metal
Zirconium (Zr) Metal
Zirconium (Zr) Metal is a lustrous, gray-white, strong transition metal that resembles titanium and is very corrosion resistant. It is a highly flammable solid and a dust explosion hazard. Zirconium does not absorb neutrons, making it an ideal material for nuclear power stations, where more than 90% of zirconium is used.

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