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Hafnium(IV) Oxide (HfO2)

Hafnium(IV) oxide is a colorless solid and is a common and stable compound of hafnium. It is an electrical insulator with low thermal expansion and a high inversion temperature. It has good cytocompatibility, high density, and corrosion and mechanical damage resistance. Hafnium(IV) oxide, while fairly inert, does react with concentrated strong acids and strong bases.

99.999% (Spectro grade)
99.95% (Zr= <0.5%)
99.9% (Vacuum deposition grade)
99% (Zr= <2%)
Typical Applications

Hafnium(IV) oxides are used in modern semiconductor devices and advanced metal oxide semiconductor devices. It is used in optical coatings and as a high-K dielectric in DRAM capacitors. It is also used as a refractory material in the insulation of devices such as thermocouples and in the passive cooling of building mechanisms. Hafnium(IV) oxide also shows potential for nanoscale bio-related applications

Packaging Options

50 lb. bags, poly-lined fiber drums, and bulk bags


Hafnium(IV) Oxide (HfO₂) TSCA (SARA Title III) Status: Unknown
For further information; please call the EPA Office of Chemical Safety and Pollution Prevention (OCSPP) at 202-564-2902.
Hafnium(IV) Oxide (HfO2) CAS Number: 12055-23-1

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