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Xenon Difluoride (XeF₂)

Xenon difluoride is a dense white crystalline solid that is a powerful fluorinating and oxidizing agent. It is a stable xenon compound; however, it is moisture sensitive and decomposes on contact with light or water vapor. It has a nauseating odor but low vapor pressure.

Purity 99.5% min.
Typical Applications

Xenon difluoride is useful in the direct fluorination of alkenes and aromatics and is a fluorination agent used in gas chromatography. Commercial uses include as a gaseous etchant for silicon, particularly in the production of microelectromechanical systems (MEMS).
Metalized xenon difluoride has potential future use as a new class of solid fuels.

Packaging Options

PTFE bottles or metal cylinders


Xenon Difluoride (XeF₂) TSCA (SARA Title III) Status: Listed
Please contact the EPA Office of Chemical Safety and Pollution Prevention (OCSPP) at 202-564-2902.

Xenon Difluoride (XeF₂) CAS Number: 13709-36-9
Xenon Difluoride UN Number: 1479 and 3085
Xenon Difluoride EINECS Number: 237-251-2
NIST Safety Data Sheet Link
Danger! Explosive when mixed with combustible material. Causes eye and skin burns. Causes digestive and respiratory tract burns, inhalation of vapors may result in pulmonary edema and chemical pneumonitis. Air sensitivity, reacts violently and decomposes to toxic compounds on contact with moisture.

Xenon Difluoride (XeF₂)

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