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Tantalum Nitride (TaN)

Tantalum Nitride is a hexagonal, brown, bronze, or black crystal that is insoluble in water. Tantalum Nitride is a chemically inert refractory compound that melts at approximately 3360ºC.

Powder distributions are available down to as small as 5 to 15 nanometers
Typical Chemistry

99.5% (metals basis)

Typical Applications

Tantalum nitride is used to create a diffusion barrier and an insulating layer between copper, or other conducting metals, interconnects in the back end of the line of integrated circuits. Tantalum nitrides are also used in thin film resistors.

Packaging Options

50 lb. net weight bags, drums, and bulk bags


Tantalum Nitride TSCA (SARA Title III) Status: Listed. For further information, please call the E.P.A. at +1.202-554-1404.
Tantalum Nitride CAS Number: 12033-62-4

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