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tantalum (III) nitride, tantalum nitride, TaN, tantalum mononitride, cas# 12033-62-4, nitrides
- Tantalum Nitride (TaN) Designations:
Chemical Formula: TaN
- Tantalum Nitride (TaN) General Description:
A tantalum compound consisting of brown to black hexagonal crystals. Tantalum nitride is insoluble in water and melts at approximately 3360 degrees Celsius. A chemically inert refractory compound. It is probably the most widely employed resistor material in thin film applications.
- Tantalum Nitride (TaN) Powder Nominal Chemical Properties Available:
Typical Chemistry: 99.5% (metals bassis)
- Tantalum Nitride (TaN) Typical Physical Properties Available:
Pieces, targets, granules, and various powder distributions down to as small as 5 to 15 nanometers
- Tantalum Nitride (TaN) Nominal Physical Constants:
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Molar Mass (g/mol.)
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194.955
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Density (kg m-3)
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13700
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Color
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Brown to Black
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Hill System Formula
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N1Ta1
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Melting Point (°C)
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~3090
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Conductivity (o (Mho/meter) x 10)
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0.000074
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Surface Area (m2/g)
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Odor
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odorless
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Mohs Hardness @20°C
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Solubility In Water
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insoluble
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Appearance
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dark grey / black crystalline solid
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Crystal Structure
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hexagonal
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- Tantalum Nitride (TaN) Powder Typical Applications:
A barrier metal used in Cu metallization scheme. Tantalum nitride (TaN) films have been shown to provide a barrier to copper diffusion while at the same time promoting good adhesion between the copper lines and the surrounding interlevel dielectric (ILD).
- Tantalum Nitride (TaN) Powder Packaging Options:
50 lbs. net weight bags, drums, and bulk bags
- Tantalum Nitride (TaN) Powder TSCA (SARA Title III) Status:
Listed. For further information please call the E.P.A. at +1.202.554.1404
- Tantalum Nitride (TaN) Powder Chemical Abstract Service Number:
CAS# 12033-62-4
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