|
 
tungsten nitride powder, tungsten nitride targets, WN, WN2, tungsten nitride (WN and WN2), tungsten nitride target, WN powder, WN2 powder, WN target, WN2 target, CAS# 37359-53-8, CAS# 12058-38-7,
- Tungsten Nitride Powder / Tungsten Nitride Targets Designations:
Chemical Name: Tungsten nitride
Chemical Formula: WN, WN2, N2W3
Tungsten nitride (WN2) is an inorganic compound, a nitride of tungsten. It is a ceramic material. It is electrically conductive. It is a very hard solid material. It has brown color. It decomposes in water.
99% min.
Targets, granules, and powder
|
Molecular Weight (g/mol.)
|
197.847
|
|
Density (g/cm3)
|
17.8
|
|
IUPAC Name
|
azanylidynetungsten
|
|
Exact Mass
|
197.954007
|
|
Melting Point (°C)
|
|
|
Boiling Point (°C)
|
|
|
Topological Polar Surface Area
|
23.8
|
|
Heavy Atom Count
|
2
|
|
Complexity
|
10
|
|
RN
|
12058-38-7
|
|
Crystal Structure
|
Cubic
|
|
Color
|
Grey
|
- Tungsten Nitride Powder / Tungsten Nitride Targets (WN and WN2) Typical Applications:
a) Tungsten nitride (WN) is another film used for conductive layers or barrier layers within integrated circuit manufacturing. Its use is not as common as pure tungsten films or titanium nitride films but appears to have much promise in the future as geometries shrink. It provides compatibility for applications using barriers in layers of W/WN and WSix / WN.
b) It is used in microelectronics as a contact material, for conductive layers, and barrier layers between silicon and other metals, eg. tungsten or copper. It is less commonly used than titanium nitride or tungsten films.
- Tungsten Nitride Powder / Tungsten Nitride Targets (WN and WN2) Packaging Options:
Bags, drums and bulk bags
- Tungsten Nitride (WN and WN2) TSCA (SARA Title III) Status:
Yes. For further information please call the U.S. Environmental Protection Agency at +1.202.554.1404
- Tungsten Nitride (WN and WN2) Chemical Abstract Service Number:
a) CAS# 37359-53-8
b) CAS# 12058-38-7
|
